Sputtering Sensor
INFICON 溅射传感器专为各种溅射过程而设计。镀金铍铜传感器体和冷却管在溅射环境中可实现最佳冷却效果。传感器头内置的磁铁可抑制因外部磁场偏转溅射系统中的高能自由电子而引起的过热。后装式晶体支架设计便于更换晶体，更换时无需从系统中拆卸传感器头。
功能
- 镀金铍铜传感器体和冷却管可实现最佳冷却效果
- 磁铁可偏转自由电子，使其远离监控器晶体
- 利用可弯曲的水管轻松安装，灵活放置传感器
- 后装式晶体插入便于更换晶体
零件号
| Sputtering Sensor | |
|---|---|
| 零件号 | 明细 |
| 750-618-G1 | 溅射传感器（仅传感器，不包括馈入件） |
规格
| 类型 | Sputtering Sensor | |
|---|---|---|
| 无水时的最高烘烤温度 | 105°C | |
| 最小水流时的最高工作等温环境温度 | 400° C | |
| 尺寸（最大外壳） | 1.36 in. OD x 0.69 in. high (3.45 cm x 1.75 cm) | |
| 水、空气和同轴长度 | Standard 30 in. (76.2 cm) | |
| 晶体交换 | Rear-loading | |
| 安装 | Customer supplied | |
| 安装要求 | ||
| 馈入件 |
2 pass water with coax connector 2¾ in. ConFlat® Flange – IPN 002-043 1 in. Bolt – IPN 002-042
|
|
| 其他 |
1) Customer to provide vacuum-tight braze joints or connectors for the water tubes. 2) XIU or Oscillator designed to interface with the specific deposition controller. |
|
| 水流速 | Minimum water flow 750 cc/min, 30° C max (Do not allow to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur. If the water tube passes through a cryoshroud, drain the tubes if the water flow is stopped for any reason. | |
| 材料 | ||
| 主体和支架 | Au plated Be-Cu | |
| 弹簧、电气触点 | Au plated Be-Cu | |
| 水管 | Au plated Be-Cu, 0.125 in. (0.32 cm) O.D. | |
| 连接器 | 304 Stainless steel | |
| 绝缘体 | 99% Al2O3 | |
| 电线 | Teflon® insulated copper | |
| 焊料 | Cadmium free silver and indium alloys | |
| 晶体 | 0.550 in. (1.4 cm) Diameter | |
| 磁铁 | ALNICO 5 Alloy | |
| 可选闸门组件 750-005-G1 规格： | ||
| 温度 | 130° C | |
| 1 in. 螺栓和 Ultra-Torr（压缩接头）端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® | |
| 温度 | Operational environment to 300ºC with water cooling or 165ºC without | |
| 安装 | 1.015 in. ±0.010 in. diameter aperture | |
| CF 40 焊接式端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
| 温度 | Operational environment to 450ºC with water cooling or 165ºC without | |
| 安装 | Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min. | |
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型号Sputtering Sensor
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常用货号（P/N）750-618-G1
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品牌inficon
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产地美国
