CrystalSix 探头
INFICON CrystalSix 晶体对于要求连续监控速率的长时间过程非常重要。CrystalSix 传感器在一个传感器头中含有 6 颗石英监控器晶体，为 OLED、MBE、太阳能、长时间光学镀膜或其他需要长时间腔室排气的过程提供安全性。与 INFICON 薄膜沉积监控器结合使用时，CrystalSix 在当前晶体失效或不稳定的情况下，会自动将新的晶体转动到适当的位置。晶体更换是自动完成的，不会中断您的过程，支持持续监控沉积速率。
功能
- 装有 6 颗晶体，可进行可靠的自动转换，从而最大限度延长过程运行时间
- 晶体转换由空气驱动完成（竞争产品是使用生热电机），因而晶体温度非常稳定
- 1/8" 管保持热稳定性，并提供传感器放置的灵活性
- 提供可选晶体闸
零件号
| CrystalSix Sensor | |
|---|---|
| 零件号 | 明细 |
| 750-446-G1 | CrystalSix 传感器（仅传感器，不包括馈入件） |
规格
| 类型 | CrystalSix Sensor | |
|---|---|---|
| 无水时的最高烘烤温度 | 130°C | |
| 最小水流时的最高工作等温环境温度 | 400° C | |
| 水、空气和同轴长度 | Standard 30 in. (76 cm) | |
| 晶体交换 | Front-loading, extraction tool required (supplied with unit) | |
| 安装 | Six #4-40 tapped holes on the back of the sensor body | |
| 尺寸（最大外壳） | 3.8 in. (9.7 cm) DIA x 2.0 in. (5.1 cm) high | |
| 安装要求 | ||
| 馈入件 |
Qty (1) 2¾ in. ConFlat® with one coaxial feedthrough, two pass water, one air IPN 750-685-G1, or, Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1,
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|
| 其他 |
User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with CrystalSix accessory kit.) |
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| 实用工具 | ||
| 最小水流 |
150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. |
|
| 可调节的空气源 | 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa – 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. | |
| 材料 | ||
| 板、支架、材料罩、机械部件 | 304 type stainless steel | |
| 弹簧、电气触点 | Au plated Be-Cu, Au Plate Inconel, 303 stainless steel | |
| 水管和空气管 | S-304, 0.125 in. (0.32 cm) O.D. x 0.016 in. (0.04 cm) Wall Thickness 30 in. Long (76 cm) seamless stainless steel tubing | |
| 连接器 (Microdot®) | Stainless steel | |
| 绝缘体 | >99% Al2O3 | |
| 电缆 | Teflon® insulated copper | |
| 晶体 | 0.550 in. Diameter | |
| 主体和圆盘 | 2024 T351 Aluminum | |
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型号Crystal Six Sensor
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常用货号（P/N）750-446-G1
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品牌inficon
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产地美国
